Development and Optimization of new Photoresists for Semiconductors

Verena Schenk, Lisa Ellmaier, Franz Stelzer, Frank Wiesbrock

Research output: Contribution to conference(Old data) Lecture or PresentationResearch

Original languageEnglish
Publication statusPublished - 11 May 2011
EventChemistry and Technology of Materials -
Duration: 23 Nov 20118 Jun 2015

Conference

ConferenceChemistry and Technology of Materials
Period23/11/118/06/15

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Cite this

Schenk, V., Ellmaier, L., Stelzer, F., & Wiesbrock, F. (2011). Development and Optimization of new Photoresists for Semiconductors. Chemistry and Technology of Materials, .