Development and Optimization of new Photoresists for Semiconductors

Verena Schenk, Lisa Ellmaier, Franz Stelzer, Frank Wiesbrock

Institute for Chemistry and Technology of Materials (6380)

Research output: Contribution to conference › (Old data) Lecture or Presentation

1 results

Finished
Surface chemistry and adhesive properties of designed photoresist polymers
Fimberger, M., Mühlbacher, I., Stelzer, F., Schenk, V. & Wiesbrock, F.
1/01/10 → 31/12/13
Project: Research project