Development and Optimization of new Photoresists for Semiconductors

Verena Schenk, Lisa Ellmaier, Franz Stelzer, Frank Wiesbrock

Publikation: Konferenzbeitrag › (Altdaten) Vortrag oder Präsentation

Originalsprache	englisch
Publikationsstatus	Veröffentlicht - 11 Mai 2011
Veranstaltung	Chemistry and Technology of Materials - Dauer: 23 Nov. 2011 → 8 Juni 2015

Konferenz	Chemistry and Technology of Materials
Zeitraum	23/11/11 → 8/06/15

Fields of Expertise

@conference{0174bd4741b444d28fbc83bad8d5dd13,

title = "Development and Optimization of new Photoresists for Semiconductors",

author = "Verena Schenk and Lisa Ellmaier and Franz Stelzer and Frank Wiesbrock",

year = "2011",

month = may,

day = "11",

language = "English",

note = "Chemistry and Technology of Materials ; Conference date: 23-11-2011 Through 08-06-2015",

}