Vacuum-Assisted Selective Adhesive Imprinting for Photonic Packaging of Complex MOEMS Devices: Assembly of Miniaturized Particle Sensor

Jaka Pribosek*, Markus Zauner, Jochen Bardong, Alfred Binder, Paul Maierhofer, Alexander Bergmann, Georg Röhrer

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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