Tuning of optical and structural properties of ZnO deposited by room temperature-plasma assisted atomic layer deposition

Research output: Contribution to conference(Old data) Lecture or PresentationResearch

Original languageEnglish
Publication statusPublished - 2 Nov 2017
Event65th International Symposium of the American Vacuum Society - Tampa, United States
Duration: 30 Oct 20174 Nov 2017

Conference

Conference65th International Symposium of the American Vacuum Society
Abbreviated titleAVS
CountryUnited States
CityTampa
Period30/10/174/11/17

Keywords

  • Zinc Oxide

Cite this

Tuning of optical and structural properties of ZnO deposited by room temperature-plasma assisted atomic layer deposition. / Perrotta, Alberto; Pilz, Julian; Coclite, Anna Maria.

2017. 65th International Symposium of the American Vacuum Society, Tampa, United States.

Research output: Contribution to conference(Old data) Lecture or PresentationResearch

Perrotta, A, Pilz, J & Coclite, AM 2017, 'Tuning of optical and structural properties of ZnO deposited by room temperature-plasma assisted atomic layer deposition' 65th International Symposium of the American Vacuum Society, Tampa, United States, 30/10/17 - 4/11/17, .
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title = "Tuning of optical and structural properties of ZnO deposited by room temperature-plasma assisted atomic layer deposition",
keywords = "Zinc Oxide",
author = "Alberto Perrotta and Julian Pilz and Coclite, {Anna Maria}",
year = "2017",
month = "11",
day = "2",
language = "English",
note = "65th International Symposium of the American Vacuum Society, AVS ; Conference date: 30-10-2017 Through 04-11-2017",

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TY - CONF

T1 - Tuning of optical and structural properties of ZnO deposited by room temperature-plasma assisted atomic layer deposition

AU - Perrotta, Alberto

AU - Pilz, Julian

AU - Coclite, Anna Maria

PY - 2017/11/2

Y1 - 2017/11/2

KW - Zinc Oxide

M3 - (Old data) Lecture or Presentation

ER -