Tuning of optical and structural properties of ZnO deposited by room temperature-plasma assisted atomic layer deposition

Alberto Perrotta, Julian Pilz, Anna Maria Coclite

Research output: Contribution to conference(Old data) Lecture or Presentation

Original languageEnglish
Publication statusPublished - 2 Nov 2017
Event2017 AVS International Symposium & Exhibition - Tampa, United States
Duration: 29 Oct 20173 Nov 2017

Conference

Conference2017 AVS International Symposium & Exhibition
Abbreviated titleAVS 2017
CountryUnited States
CityTampa
Period29/10/173/11/17

Keywords

  • Zinc Oxide

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