Tuning of optical and structural properties of ZnO deposited by room temperature-plasma assisted atomic layer deposition

Publikation: Konferenzbeitrag(Altdaten) Vortrag oder PräsentationForschung

Originalspracheenglisch
PublikationsstatusVeröffentlicht - 2 Nov 2017
Veranstaltung65th International Symposium of the American Vacuum Society - Tampa, USA / Vereinigte Staaten
Dauer: 30 Okt 20174 Nov 2017

Konferenz

Konferenz65th International Symposium of the American Vacuum Society
KurztitelAVS
LandUSA / Vereinigte Staaten
OrtTampa
Zeitraum30/10/174/11/17

Schlagwörter

    Dies zitieren

    Tuning of optical and structural properties of ZnO deposited by room temperature-plasma assisted atomic layer deposition. / Perrotta, Alberto; Pilz, Julian; Coclite, Anna Maria.

    2017. 65th International Symposium of the American Vacuum Society, Tampa, USA / Vereinigte Staaten.

    Publikation: Konferenzbeitrag(Altdaten) Vortrag oder PräsentationForschung

    Perrotta A, Pilz J, Coclite AM. Tuning of optical and structural properties of ZnO deposited by room temperature-plasma assisted atomic layer deposition. 2017. 65th International Symposium of the American Vacuum Society, Tampa, USA / Vereinigte Staaten.
    @conference{0135214180e449bbb35fddb00b9dc2e6,
    title = "Tuning of optical and structural properties of ZnO deposited by room temperature-plasma assisted atomic layer deposition",
    keywords = "Zinc Oxide",
    author = "Alberto Perrotta and Julian Pilz and Coclite, {Anna Maria}",
    year = "2017",
    month = "11",
    day = "2",
    language = "English",
    note = "65th International Symposium of the American Vacuum Society, AVS ; Conference date: 30-10-2017 Through 04-11-2017",

    }

    TY - CONF

    T1 - Tuning of optical and structural properties of ZnO deposited by room temperature-plasma assisted atomic layer deposition

    AU - Perrotta, Alberto

    AU - Pilz, Julian

    AU - Coclite, Anna Maria

    PY - 2017/11/2

    Y1 - 2017/11/2

    KW - Zinc Oxide

    M3 - (Old data) Lecture or Presentation

    ER -