Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide

Anton Buchberger; Paul Maierhofer; Alexander Bergmann; Anderson Singulani; Martin Sagmeister; Victor Sidorov; Jochen Kraft; Marcus Baumgart; Andreas Tortschanoff

doi:10.1109/SENSORS43011.2019.8956493

Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide

Anton Buchberger, Paul Maierhofer, Alexander Bergmann, Anderson Singulani, Martin Sagmeister, Victor Sidorov, Jochen Kraft, Marcus Baumgart, Andreas Tortschanoff

Institute of Electrical Measurement and Sensor Systems (4530)

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › peer-review

Abstract

The interaction between analytes and the evanescent field of a waveguide can be exploited for highly sensitive measurement devices, which find already wide usage as chemical and biological sensors. Based on this sensor principle, we designed a single particle detector, featuring a silicon nitride waveguide with sub-micron dimensions, a diode laser, and a photodetector. The first prototype provides single counting efficiency for PSL spheres down to a diameter of 200 nm.

Original language	English
Title of host publication	2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings
ISBN (Electronic)	978-1-7281-1634-1
DOIs	https://doi.org/10.1109/SENSORS43011.2019.8956493
Publication status	Published - 13 Jan 2020
Event	IEEE Sensors 2019 - Palais des Congrès de Montréal, Montreal, Canada Duration: 27 Oct 2019 → 30 Oct 2019 https://ieee-sensors2019.org/

Publication series

Name	Proceedings of IEEE Sensors
Volume	2019-October
ISSN (Print)	1930-0395
ISSN (Electronic)	2168-9229

Conference

Conference	IEEE Sensors 2019
Country/Territory	Canada
City	Montreal
Period	27/10/19 → 30/10/19
Internet address	https://ieee-sensors2019.org/

Keywords

Particulate Matter
Single Particle
Evanescent field
Silicon Photonics
Silicon Nitride
Waveguide

ASJC Scopus subject areas

Electrical and Electronic Engineering

Fields of Expertise

Advanced Materials Science

Access to Document

10.1109/SENSORS43011.2019.8956493

Cite this

Buchberger, A., Maierhofer, P., Bergmann, A., Singulani, A., Sagmeister, M., Sidorov, V., Kraft, J., Baumgart, M., & Tortschanoff, A. (2020). Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide. In 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings Article 8956493 (Proceedings of IEEE Sensors; Vol. 2019-October). https://doi.org/10.1109/SENSORS43011.2019.8956493

Buchberger, A, Maierhofer, P, Bergmann, A, Singulani, A, Sagmeister, M, Sidorov, V, Kraft, J, Baumgart, M & Tortschanoff, A 2020, Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide. in 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings., 8956493, Proceedings of IEEE Sensors, vol. 2019-October, IEEE Sensors 2019, Montreal, Quebec, Canada, 27/10/19. https://doi.org/10.1109/SENSORS43011.2019.8956493

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title = "Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide",

abstract = "The interaction between analytes and the evanescent field of a waveguide can be exploited for highly sensitive measurement devices, which find already wide usage as chemical and biological sensors. Based on this sensor principle, we designed a single particle detector, featuring a silicon nitride waveguide with sub-micron dimensions, a diode laser, and a photodetector. The first prototype provides single counting efficiency for PSL spheres down to a diameter of 200 nm.",

keywords = "Particulate Matter, Single Particle, Evanescent field, Silicon Photonics, Silicon Nitride, Waveguide",

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AU - Sagmeister, Martin

AU - Sidorov, Victor

AU - Kraft, Jochen

AU - Baumgart, Marcus

AU - Tortschanoff, Andreas

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AB - The interaction between analytes and the evanescent field of a waveguide can be exploited for highly sensitive measurement devices, which find already wide usage as chemical and biological sensors. Based on this sensor principle, we designed a single particle detector, featuring a silicon nitride waveguide with sub-micron dimensions, a diode laser, and a photodetector. The first prototype provides single counting efficiency for PSL spheres down to a diameter of 200 nm.

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KW - Single Particle

KW - Evanescent field

KW - Silicon Photonics

KW - Silicon Nitride

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Y2 - 27 October 2019 through 30 October 2019

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Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

Fields of Expertise

Access to Document

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