Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide

Anton Buchberger, Paul Maierhofer, Alexander Bergmann, Anderson Singulani, Martin Sagmeister, Victor Sidorov, Jochen Kraft, Marcus Baumgart, Andreas Tortschanoff

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

Abstract

The interaction between analytes and the evanescent field of a waveguide can be exploited for highly sensitive measurement devices, which find already wide usage as chemical and biological sensors. Based on this sensor principle, we designed a single particle detector, featuring a silicon nitride waveguide with sub-micron dimensions, a diode laser, and a photodetector. The first prototype provides single counting efficiency for PSL spheres down to a diameter of 200 nm.
Original languageEnglish
Title of host publication2019 IEEE Sensors
ISBN (Electronic)978-1-7281-1634-1
DOIs
Publication statusPublished - 13 Jan 2020
EventIEEE Sensors 2019 - Palais des Congrès de Montréal, Montreal, Canada
Duration: 27 Oct 201930 Oct 2019
https://ieee-sensors2019.org/

Conference

ConferenceIEEE Sensors 2019
CountryCanada
CityMontreal
Period27/10/1930/10/19
Internet address

Fingerprint

radiation counters
silicon nitrides
waveguides
sensors
photometers
counting
semiconductor lasers
prototypes
interactions

Keywords

  • Particulate Matter
  • Single Particle
  • Evanescent field
  • Silicon Photonics
  • Silicon Nitride
  • Waveguide

Fields of Expertise

  • Advanced Materials Science

Cite this

Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide. / Buchberger, Anton; Maierhofer, Paul; Bergmann, Alexander; Singulani, Anderson; Sagmeister, Martin; Sidorov, Victor; Kraft, Jochen; Baumgart, Marcus; Tortschanoff, Andreas.

2019 IEEE Sensors. 2020.

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

Buchberger, A, Maierhofer, P, Bergmann, A, Singulani, A, Sagmeister, M, Sidorov, V, Kraft, J, Baumgart, M & Tortschanoff, A 2020, Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide. in 2019 IEEE Sensors. IEEE Sensors 2019, Montreal, Canada, 27/10/19. https://doi.org/10.1109/SENSORS43011.2019.8956493
Buchberger, Anton ; Maierhofer, Paul ; Bergmann, Alexander ; Singulani, Anderson ; Sagmeister, Martin ; Sidorov, Victor ; Kraft, Jochen ; Baumgart, Marcus ; Tortschanoff, Andreas. / Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide. 2019 IEEE Sensors. 2020.
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