Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide

Anton Buchberger, Paul Maierhofer, Alexander Bergmann, Anderson Singulani, Martin Sagmeister, Victor Sidorov, Jochen Kraft, Marcus Baumgart, Andreas Tortschanoff

Publikation: Beitrag in Buch/Bericht/KonferenzbandBeitrag in einem KonferenzbandForschungBegutachtung

Abstract

The interaction between analytes and the evanescent field of a waveguide can be exploited for highly sensitive measurement devices, which find already wide usage as chemical and biological sensors. Based on this sensor principle, we designed a single particle detector, featuring a silicon nitride waveguide with sub-micron dimensions, a diode laser, and a photodetector. The first prototype provides single counting efficiency for PSL spheres down to a diameter of 200 nm.
Originalspracheenglisch
Titel2019 IEEE Sensors
ISBN (elektronisch)978-1-7281-1634-1
DOIs
PublikationsstatusVeröffentlicht - 13 Jan 2020
VeranstaltungIEEE Sensors 2019 - Palais des Congrès de Montréal, Montreal, Kanada
Dauer: 27 Okt 201930 Okt 2019
https://ieee-sensors2019.org/

Konferenz

KonferenzIEEE Sensors 2019
LandKanada
OrtMontreal
Zeitraum27/10/1930/10/19
Internetadresse

Fingerprint

radiation counters
silicon nitrides
waveguides
sensors
photometers
counting
semiconductor lasers
prototypes
interactions

Schlagwörter

    Fields of Expertise

    • Advanced Materials Science

    Dies zitieren

    Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide. / Buchberger, Anton; Maierhofer, Paul; Bergmann, Alexander; Singulani, Anderson; Sagmeister, Martin; Sidorov, Victor; Kraft, Jochen; Baumgart, Marcus; Tortschanoff, Andreas.

    2019 IEEE Sensors. 2020.

    Publikation: Beitrag in Buch/Bericht/KonferenzbandBeitrag in einem KonferenzbandForschungBegutachtung

    Buchberger, A, Maierhofer, P, Bergmann, A, Singulani, A, Sagmeister, M, Sidorov, V, Kraft, J, Baumgart, M & Tortschanoff, A 2020, Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide. in 2019 IEEE Sensors. IEEE Sensors 2019, Montreal, Kanada, 27/10/19. https://doi.org/10.1109/SENSORS43011.2019.8956493
    Buchberger, Anton ; Maierhofer, Paul ; Bergmann, Alexander ; Singulani, Anderson ; Sagmeister, Martin ; Sidorov, Victor ; Kraft, Jochen ; Baumgart, Marcus ; Tortschanoff, Andreas. / Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide. 2019 IEEE Sensors. 2020.
    @inproceedings{c545df2dcbf548c1bb39413b9962cd90,
    title = "Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide",
    abstract = "The interaction between analytes and the evanescent field of a waveguide can be exploited for highly sensitive measurement devices, which find already wide usage as chemical and biological sensors. Based on this sensor principle, we designed a single particle detector, featuring a silicon nitride waveguide with sub-micron dimensions, a diode laser, and a photodetector. The first prototype provides single counting efficiency for PSL spheres down to a diameter of 200 nm.",
    keywords = "Particulate Matter, Single Particle, Evanescent field, Silicon Photonics, Silicon Nitride, Waveguide",
    author = "Anton Buchberger and Paul Maierhofer and Alexander Bergmann and Anderson Singulani and Martin Sagmeister and Victor Sidorov and Jochen Kraft and Marcus Baumgart and Andreas Tortschanoff",
    year = "2020",
    month = "1",
    day = "13",
    doi = "10.1109/SENSORS43011.2019.8956493",
    language = "English",
    booktitle = "2019 IEEE Sensors",

    }

    TY - GEN

    T1 - Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide

    AU - Buchberger, Anton

    AU - Maierhofer, Paul

    AU - Bergmann, Alexander

    AU - Singulani, Anderson

    AU - Sagmeister, Martin

    AU - Sidorov, Victor

    AU - Kraft, Jochen

    AU - Baumgart, Marcus

    AU - Tortschanoff, Andreas

    PY - 2020/1/13

    Y1 - 2020/1/13

    N2 - The interaction between analytes and the evanescent field of a waveguide can be exploited for highly sensitive measurement devices, which find already wide usage as chemical and biological sensors. Based on this sensor principle, we designed a single particle detector, featuring a silicon nitride waveguide with sub-micron dimensions, a diode laser, and a photodetector. The first prototype provides single counting efficiency for PSL spheres down to a diameter of 200 nm.

    AB - The interaction between analytes and the evanescent field of a waveguide can be exploited for highly sensitive measurement devices, which find already wide usage as chemical and biological sensors. Based on this sensor principle, we designed a single particle detector, featuring a silicon nitride waveguide with sub-micron dimensions, a diode laser, and a photodetector. The first prototype provides single counting efficiency for PSL spheres down to a diameter of 200 nm.

    KW - Particulate Matter

    KW - Single Particle

    KW - Evanescent field

    KW - Silicon Photonics

    KW - Silicon Nitride

    KW - Waveguide

    U2 - 10.1109/SENSORS43011.2019.8956493

    DO - 10.1109/SENSORS43011.2019.8956493

    M3 - Conference contribution

    BT - 2019 IEEE Sensors

    ER -