Imaging of ultrathin silicon oxide layers in semiconducting devices by means of energy filtering transmission electron microscopy (EFTEM)

Bernhard Schaffer, Werner Grogger, Ferdinand Hofer

Research output: Chapter in Book/Report/Conference proceedingConference paper

Original languageEnglish
Title of host publication13th Int. Conf. on Microscopy of Semiconducting Materials (MSM13), Cambridge
Publisher.
PagesMSM13-MSM13
Publication statusPublished - 2003

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