Imaging of ultrathin silicon oxide layers in semiconducting devices by means of energy filtering transmission electron microscopy (EFTEM)

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › peer-review

Original language	English
Title of host publication	13th Int. Conf. on Microscopy of Semiconducting Materials (MSM13), Cambridge
Publisher	.
Pages	MSM13-MSM13
Publication status	Published - 2003

Cite this

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › peer-review

@inproceedings{a55d62d647bd4977b22492db839557ef,

title = "Imaging of ultrathin silicon oxide layers in semiconducting devices by means of energy filtering transmission electron microscopy (EFTEM)",

author = "Bernhard Schaffer and Werner Grogger and Ferdinand Hofer",

year = "2003",

language = "English",

pages = "MSM13--MSM13",

booktitle = "13th Int. Conf. on Microscopy of Semiconducting Materials (MSM13), Cambridge",

publisher = ".",

}

TY - GEN

T1 - Imaging of ultrathin silicon oxide layers in semiconducting devices by means of energy filtering transmission electron microscopy (EFTEM)

AU - Schaffer, Bernhard

AU - Grogger, Werner

AU - Hofer, Ferdinand

PY - 2003

Y1 - 2003

M3 - Conference paper

SP - MSM13-MSM13

BT - 13th Int. Conf. on Microscopy of Semiconducting Materials (MSM13), Cambridge

PB - .

ER -