Imaging of ultrathin silicon oxide layers in semiconducting devices by means of energy filtering transmission electron microscopy (EFTEM)

Bernhard Schaffer, Werner Grogger, Ferdinand Hofer

Publikation: Beitrag in Buch/Bericht/KonferenzbandBeitrag in einem KonferenzbandForschungBegutachtung

Originalspracheenglisch
Titel13th Int. Conf. on Microscopy of Semiconducting Materials (MSM13), Cambridge
Herausgeber (Verlag).
SeitenMSM13-MSM13
PublikationsstatusVeröffentlicht - 2003

Dies zitieren

Schaffer, B., Grogger, W., & Hofer, F. (2003). Imaging of ultrathin silicon oxide layers in semiconducting devices by means of energy filtering transmission electron microscopy (EFTEM). in 13th Int. Conf. on Microscopy of Semiconducting Materials (MSM13), Cambridge (S. MSM13-MSM13). ..

Imaging of ultrathin silicon oxide layers in semiconducting devices by means of energy filtering transmission electron microscopy (EFTEM). / Schaffer, Bernhard; Grogger, Werner; Hofer, Ferdinand.

13th Int. Conf. on Microscopy of Semiconducting Materials (MSM13), Cambridge. ., 2003. S. MSM13-MSM13.

Publikation: Beitrag in Buch/Bericht/KonferenzbandBeitrag in einem KonferenzbandForschungBegutachtung

Schaffer, B, Grogger, W & Hofer, F 2003, Imaging of ultrathin silicon oxide layers in semiconducting devices by means of energy filtering transmission electron microscopy (EFTEM). in 13th Int. Conf. on Microscopy of Semiconducting Materials (MSM13), Cambridge. ., S. MSM13-MSM13.
Schaffer B, Grogger W, Hofer F. Imaging of ultrathin silicon oxide layers in semiconducting devices by means of energy filtering transmission electron microscopy (EFTEM). in 13th Int. Conf. on Microscopy of Semiconducting Materials (MSM13), Cambridge. . 2003. S. MSM13-MSM13
Schaffer, Bernhard ; Grogger, Werner ; Hofer, Ferdinand. / Imaging of ultrathin silicon oxide layers in semiconducting devices by means of energy filtering transmission electron microscopy (EFTEM). 13th Int. Conf. on Microscopy of Semiconducting Materials (MSM13), Cambridge. ., 2003. S. MSM13-MSM13
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