Focused Electron Beam Induced Deposition Synthesis of 3D Photonic and Magnetic Nanoresonators

Grace Pakeltis, Zhongwei Hu, Austin G. Nixon, Eva Mutunga, C. Praise Anyanwu, Claire A. West, Juan Carlos Idrobo, Harald Plank, David J. Masiello, Jason D. Fowlkes, Philip D. Rack

Research output: Contribution to journalArticleResearchpeer-review

Abstract

While many plasmonic phenomena have been realized by using standard nanoscale synthesis in a single 2-dimensional plane, enhanced functionality should be possible by extending into the third dimension. Several nanoscale synthesis approaches have been explored to achieve 3-dimensional (3d) geometries; however, a robust strategy for synthesizing complex 3d plasmonic architectures is lacking. In this study, we utilize a hybrid of direct-write 3d nanoprinting and thin film deposition to fabricate 3d plasmonic structures. Focused electron beam induced deposition (FEBID) is used to deposit nonplasmonic 3d scaffolds, which are subsequently isolated with a conformal SiO2 layer and coated with a gold layer to create functional 3d plasmonic nanostructures. A variety of rod antennae, split-ring nanoresonators, and ring resonators are synthesized, and low-loss electron energy loss spectroscopy (EELS) is utilized to characterize their full plasmonic spectra with nanoscale resolution. Complementary EELS simulations are performed to interpret the spectra and elucidate the associated electric and magnetic field distributions of the infrared and near optical modes. This work demonstrates the flexibility that FEBID scaffolds offer for the advancement of 3d plasmonic devices and future advanced optical and magnetic metamaterials.

Original languageEnglish
Pages (from-to)8075-8082
Number of pages8
JournalACS Applied Nano Materials
Volume2
Issue number12
DOIs
Publication statusPublished - 27 Dec 2019

Fingerprint

Photonics
Electron beams
Electron energy loss spectroscopy
Scaffolds
Metamaterials
Gold
Resonators
Nanostructures
Deposits
Electric fields
Antennas
Magnetic fields
Infrared radiation
Thin films
Geometry

Keywords

  • 3d printing
  • metamaterials
  • nanomagnetic
  • nanoresonators
  • nanoscale synthesis
  • plasmonics

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Pakeltis, G., Hu, Z., Nixon, A. G., Mutunga, E., Anyanwu, C. P., West, C. A., ... Rack, P. D. (2019). Focused Electron Beam Induced Deposition Synthesis of 3D Photonic and Magnetic Nanoresonators. ACS Applied Nano Materials, 2(12), 8075-8082. https://doi.org/10.1021/acsanm.9b02182

Focused Electron Beam Induced Deposition Synthesis of 3D Photonic and Magnetic Nanoresonators. / Pakeltis, Grace; Hu, Zhongwei; Nixon, Austin G.; Mutunga, Eva; Anyanwu, C. Praise; West, Claire A.; Idrobo, Juan Carlos; Plank, Harald; Masiello, David J.; Fowlkes, Jason D.; Rack, Philip D.

In: ACS Applied Nano Materials, Vol. 2, No. 12, 27.12.2019, p. 8075-8082.

Research output: Contribution to journalArticleResearchpeer-review

Pakeltis, G, Hu, Z, Nixon, AG, Mutunga, E, Anyanwu, CP, West, CA, Idrobo, JC, Plank, H, Masiello, DJ, Fowlkes, JD & Rack, PD 2019, 'Focused Electron Beam Induced Deposition Synthesis of 3D Photonic and Magnetic Nanoresonators' ACS Applied Nano Materials, vol. 2, no. 12, pp. 8075-8082. https://doi.org/10.1021/acsanm.9b02182
Pakeltis, Grace ; Hu, Zhongwei ; Nixon, Austin G. ; Mutunga, Eva ; Anyanwu, C. Praise ; West, Claire A. ; Idrobo, Juan Carlos ; Plank, Harald ; Masiello, David J. ; Fowlkes, Jason D. ; Rack, Philip D. / Focused Electron Beam Induced Deposition Synthesis of 3D Photonic and Magnetic Nanoresonators. In: ACS Applied Nano Materials. 2019 ; Vol. 2, No. 12. pp. 8075-8082.
@article{d325d9896d9c4ee18df634285b15344b,
title = "Focused Electron Beam Induced Deposition Synthesis of 3D Photonic and Magnetic Nanoresonators",
abstract = "While many plasmonic phenomena have been realized by using standard nanoscale synthesis in a single 2-dimensional plane, enhanced functionality should be possible by extending into the third dimension. Several nanoscale synthesis approaches have been explored to achieve 3-dimensional (3d) geometries; however, a robust strategy for synthesizing complex 3d plasmonic architectures is lacking. In this study, we utilize a hybrid of direct-write 3d nanoprinting and thin film deposition to fabricate 3d plasmonic structures. Focused electron beam induced deposition (FEBID) is used to deposit nonplasmonic 3d scaffolds, which are subsequently isolated with a conformal SiO2 layer and coated with a gold layer to create functional 3d plasmonic nanostructures. A variety of rod antennae, split-ring nanoresonators, and ring resonators are synthesized, and low-loss electron energy loss spectroscopy (EELS) is utilized to characterize their full plasmonic spectra with nanoscale resolution. Complementary EELS simulations are performed to interpret the spectra and elucidate the associated electric and magnetic field distributions of the infrared and near optical modes. This work demonstrates the flexibility that FEBID scaffolds offer for the advancement of 3d plasmonic devices and future advanced optical and magnetic metamaterials.",
keywords = "3d printing, metamaterials, nanomagnetic, nanoresonators, nanoscale synthesis, plasmonics",
author = "Grace Pakeltis and Zhongwei Hu and Nixon, {Austin G.} and Eva Mutunga and Anyanwu, {C. Praise} and West, {Claire A.} and Idrobo, {Juan Carlos} and Harald Plank and Masiello, {David J.} and Fowlkes, {Jason D.} and Rack, {Philip D.}",
year = "2019",
month = "12",
day = "27",
doi = "10.1021/acsanm.9b02182",
language = "English",
volume = "2",
pages = "8075--8082",
journal = "ACS Applied Nano Materials",
issn = "2574-0970",
publisher = "ACS Publications",
number = "12",

}

TY - JOUR

T1 - Focused Electron Beam Induced Deposition Synthesis of 3D Photonic and Magnetic Nanoresonators

AU - Pakeltis, Grace

AU - Hu, Zhongwei

AU - Nixon, Austin G.

AU - Mutunga, Eva

AU - Anyanwu, C. Praise

AU - West, Claire A.

AU - Idrobo, Juan Carlos

AU - Plank, Harald

AU - Masiello, David J.

AU - Fowlkes, Jason D.

AU - Rack, Philip D.

PY - 2019/12/27

Y1 - 2019/12/27

N2 - While many plasmonic phenomena have been realized by using standard nanoscale synthesis in a single 2-dimensional plane, enhanced functionality should be possible by extending into the third dimension. Several nanoscale synthesis approaches have been explored to achieve 3-dimensional (3d) geometries; however, a robust strategy for synthesizing complex 3d plasmonic architectures is lacking. In this study, we utilize a hybrid of direct-write 3d nanoprinting and thin film deposition to fabricate 3d plasmonic structures. Focused electron beam induced deposition (FEBID) is used to deposit nonplasmonic 3d scaffolds, which are subsequently isolated with a conformal SiO2 layer and coated with a gold layer to create functional 3d plasmonic nanostructures. A variety of rod antennae, split-ring nanoresonators, and ring resonators are synthesized, and low-loss electron energy loss spectroscopy (EELS) is utilized to characterize their full plasmonic spectra with nanoscale resolution. Complementary EELS simulations are performed to interpret the spectra and elucidate the associated electric and magnetic field distributions of the infrared and near optical modes. This work demonstrates the flexibility that FEBID scaffolds offer for the advancement of 3d plasmonic devices and future advanced optical and magnetic metamaterials.

AB - While many plasmonic phenomena have been realized by using standard nanoscale synthesis in a single 2-dimensional plane, enhanced functionality should be possible by extending into the third dimension. Several nanoscale synthesis approaches have been explored to achieve 3-dimensional (3d) geometries; however, a robust strategy for synthesizing complex 3d plasmonic architectures is lacking. In this study, we utilize a hybrid of direct-write 3d nanoprinting and thin film deposition to fabricate 3d plasmonic structures. Focused electron beam induced deposition (FEBID) is used to deposit nonplasmonic 3d scaffolds, which are subsequently isolated with a conformal SiO2 layer and coated with a gold layer to create functional 3d plasmonic nanostructures. A variety of rod antennae, split-ring nanoresonators, and ring resonators are synthesized, and low-loss electron energy loss spectroscopy (EELS) is utilized to characterize their full plasmonic spectra with nanoscale resolution. Complementary EELS simulations are performed to interpret the spectra and elucidate the associated electric and magnetic field distributions of the infrared and near optical modes. This work demonstrates the flexibility that FEBID scaffolds offer for the advancement of 3d plasmonic devices and future advanced optical and magnetic metamaterials.

KW - 3d printing

KW - metamaterials

KW - nanomagnetic

KW - nanoresonators

KW - nanoscale synthesis

KW - plasmonics

UR - http://www.scopus.com/inward/record.url?scp=85076109751&partnerID=8YFLogxK

U2 - 10.1021/acsanm.9b02182

DO - 10.1021/acsanm.9b02182

M3 - Article

VL - 2

SP - 8075

EP - 8082

JO - ACS Applied Nano Materials

JF - ACS Applied Nano Materials

SN - 2574-0970

IS - 12

ER -