Thermally induced stresses in thin aluminium layers grown on silicon

Ernst Eiper, Roland Resel, C. Eisenmenger-Sittner, M. Hafok, J. Keckes

Publikation: Beitrag in einer Fachzeitschrift › Artikel › Begutachtung

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@article{f638c65924c64bda9f61a27d16a372e7,

title = "Thermally induced stresses in thin aluminium layers grown on silicon",

author = "Ernst Eiper and Roland Resel and C. Eisenmenger-Sittner and M. Hafok and J. Keckes",

year = "2004",

doi = "10.1154/1.1649326",

language = "English",

volume = "19",

pages = "74--76",

journal = "Powder diffraction",

issn = "0885-7156",

publisher = "International Centre For Diffraction Data",

number = "1",

}