Microscale investigation of surface contaminations during silicon epitaxial growth"

Brigitte Patsch, T. Ehmann, R. Kirchner, G. Puppe, Ernst Lankmayr

Publikation: Beitrag in einer FachzeitschriftArtikelForschungBegutachtung

Originalspracheenglisch
Seiten (von - bis)0-0
FachzeitschriftMicrochimica acta
DOIs
PublikationsstatusVeröffentlicht - 2008

Treatment code (Nähere Zuordnung)

  • Experimental

Dies zitieren

Microscale investigation of surface contaminations during silicon epitaxial growth". / Patsch, Brigitte; Ehmann, T.; Kirchner, R.; Puppe, G.; Lankmayr, Ernst.

in: Microchimica acta, 2008, S. 0-0.

Publikation: Beitrag in einer FachzeitschriftArtikelForschungBegutachtung

Patsch, Brigitte ; Ehmann, T. ; Kirchner, R. ; Puppe, G. ; Lankmayr, Ernst. / Microscale investigation of surface contaminations during silicon epitaxial growth". in: Microchimica acta. 2008 ; S. 0-0.
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AU - Ehmann, T.

AU - Kirchner, R.

AU - Puppe, G.

AU - Lankmayr, Ernst

PY - 2008

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