Microscale investigation of surface contaminations during silicon epitaxial growth"

Brigitte Patsch, T. Ehmann, R. Kirchner, G. Puppe, Ernst Lankmayr

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)0-0
JournalMicrochimica acta
DOIs
Publication statusPublished - 2008

Treatment code (Nähere Zuordnung)

  • Experimental

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