Microscale investigation of surface contaminations during silicon epitaxial growth"

Brigitte Patsch, T. Ehmann, R. Kirchner, G. Puppe, Ernst Lankmayr

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)0-0
JournalMicrochimica acta
DOIs
Publication statusPublished - 2008

Treatment code (Nähere Zuordnung)

  • Experimental

Cite this

Microscale investigation of surface contaminations during silicon epitaxial growth". / Patsch, Brigitte; Ehmann, T.; Kirchner, R.; Puppe, G.; Lankmayr, Ernst.

In: Microchimica acta, 2008, p. 0-0.

Research output: Contribution to journalArticleResearchpeer-review

Patsch, Brigitte ; Ehmann, T. ; Kirchner, R. ; Puppe, G. ; Lankmayr, Ernst. / Microscale investigation of surface contaminations during silicon epitaxial growth". In: Microchimica acta. 2008 ; pp. 0-0.
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AU - Ehmann, T.

AU - Kirchner, R.

AU - Puppe, G.

AU - Lankmayr, Ernst

PY - 2008

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