Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review

Ivo Utke, Johann Michler, Robert Winkler, Harald Plank

Publikation: Beitrag in einer FachzeitschriftArtikelForschungBegutachtung

Abstract

Abstract: This article reviews the state-of-the -art of mechanical material properties and measurementmethods of nanostructures obtained by two nanoscale additive manufacturing methods: gas-assistedfocused electron and focused ion beam-induced deposition using volatile organic and organometallicprecursors. Gas-assisted focused electron and ion beam-induced deposition-based additivemanufacturing technologies enable the direct-write fabrication of complex 3D nanostructures withfeature dimensions below 50 nm, pore-free and nanometer-smooth high-fidelity surfaces, andan increasing flexibility in choice of materials via novel precursors. We discuss the principles,possibilities, and literature proven examples related to the mechanical properties of such 3Dnanoobjects. Most materials fabricated via these approaches reveal a metal matrix composition withmetallic nanograins embedded in a carbonaceous matrix. By that, specific material functionalities,such as magnetic, electrical, or optical can be largely independently tuned with respect to mechanicalproperties governed mostly by the matrix. The carbonaceous matrix can be precisely tuned viaelectron and/or ion beam irradiation with respect to the carbon network, carbon hybridization, andvolatile element content and thus take mechanical properties ranging from polymeric-like overamorphous-like toward diamond-like behavior. Such metal matrix nanostructures open up entirelynew applications, which exploit their full potential in combination with the unique 3D additivemanufacturing capabilities at the nanoscale.
Originalspracheenglisch
Aufsatznummer397
Seitenumfang47
FachzeitschriftMicromachines
Jahrgang11
Ausgabenummer4
DOIs
PublikationsstatusVeröffentlicht - 2020

ASJC Scopus subject areas

  • !!Materials Science(all)

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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