Focused particle beam nano-machining: the next evolution step towards simulation aided process prediction

Publikation: Beitrag in einer FachzeitschriftArtikelForschungBegutachtung

Originalspracheenglisch
Seiten (von - bis)050501-pp4
FachzeitschriftNanotechnology
Jahrgang26
DOIs
PublikationsstatusVeröffentlicht - 2015

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Dies zitieren

Focused particle beam nano-machining: the next evolution step towards simulation aided process prediction. / Plank, Harald.

in: Nanotechnology, Jahrgang 26, 2015, S. 050501-pp4.

Publikation: Beitrag in einer FachzeitschriftArtikelForschungBegutachtung

@article{eb8c91ece6b94d26a0393b8e39164a36,
title = "Focused particle beam nano-machining: the next evolution step towards simulation aided process prediction",
author = "Harald Plank",
year = "2015",
doi = "10.1088/0957-4484/26/5/050501",
language = "English",
volume = "26",
pages = "050501--pp4",
journal = "Nanotechnology",
issn = "0957-4484",
publisher = "IOP Publishing Ltd.",

}

TY - JOUR

T1 - Focused particle beam nano-machining: the next evolution step towards simulation aided process prediction

AU - Plank, Harald

PY - 2015

Y1 - 2015

U2 - 10.1088/0957-4484/26/5/050501

DO - 10.1088/0957-4484/26/5/050501

M3 - Article

VL - 26

SP - 50501

EP - 50504

JO - Nanotechnology

JF - Nanotechnology

SN - 0957-4484

ER -