Focused particle beam nano-machining: the next evolution step towards simulation aided process prediction

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)050501-pp4
JournalNanotechnology
Volume26
DOIs
Publication statusPublished - 2015

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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