Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing(RTP)

Volha Matylitskaya, Oliver Brunkahl, Gerald Kothleitner, Wolfgang Bock, Kolbesen Bernd

Publikation: Beitrag in einer Fachzeitschrift › Artikel › Begutachtung

Originalsprache	englisch
Seiten (von - bis)	1802-1816
Fachzeitschrift	Physica Status Solidi (C) - Current Topics in Solid State Physics
Jahrgang	6
DOIs	https://doi.org/10.1002/pssc.200675231
Publikationsstatus	Veröffentlicht - 2007

Treatment code (Nähere Zuordnung)

Publikation: Beitrag in einer Fachzeitschrift › Artikel › Begutachtung

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title = "Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing(RTP)",

author = "Volha Matylitskaya and Oliver Brunkahl and Gerald Kothleitner and Wolfgang Bock and Kolbesen Bernd",

year = "2007",

doi = "10.1002/pssc.200675231",

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journal = "Physica Status Solidi (C) - Current Topics in Solid State Physics",

issn = "1610-1642",

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TY - JOUR

T1 - Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing(RTP)

AU - Matylitskaya, Volha

AU - Brunkahl, Oliver

AU - Kothleitner, Gerald

AU - Bock, Wolfgang

AU - Bernd, Kolbesen

PY - 2007

Y1 - 2007

U2 - 10.1002/pssc.200675231

DO - 10.1002/pssc.200675231

M3 - Article

SN - 1610-1642

VL - 6

SP - 1802

EP - 1816

JO - Physica Status Solidi (C) - Current Topics in Solid State Physics

JF - Physica Status Solidi (C) - Current Topics in Solid State Physics

ER -