| Original language | English |
|---|---|
| Pages (from-to) | 1802-1816 |
| Journal | Physica status solidi / C |
| Volume | 6 |
| DOIs | |
| Publication status | Published - 2007 |
Treatment code (Nähere Zuordnung)
- Basic - Fundamental (Grundlagenforschung)
Cite this
Matylitskaya, V., Brunkahl, O., Kothleitner, G., Bock, W., & Bernd, K. (2007). Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing(RTP). Physica status solidi / C, 6, 1802-1816. https://doi.org/10.1002/pssc.200675231
Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing(RTP). / Matylitskaya, Volha; Brunkahl, Oliver; Kothleitner, Gerald; Bock, Wolfgang; Bernd, Kolbesen.
In: Physica status solidi / C, Vol. 6, 2007, p. 1802-1816.Research output: Contribution to journal › Article › Research › peer-review
Matylitskaya, V, Brunkahl, O, Kothleitner, G, Bock, W & Bernd, K 2007, 'Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing(RTP)' Physica status solidi / C, vol. 6, pp. 1802-1816. https://doi.org/10.1002/pssc.200675231
Matylitskaya V, Brunkahl O, Kothleitner G, Bock W, Bernd K. Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing(RTP). Physica status solidi / C. 2007;6:1802-1816. https://doi.org/10.1002/pssc.200675231
@article{11ef31db21e6491cae167cf1b19f86f0,
title = "Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing(RTP)",
author = "Volha Matylitskaya and Oliver Brunkahl and Gerald Kothleitner and Wolfgang Bock and Kolbesen Bernd",
year = "2007",
doi = "10.1002/pssc.200675231",
language = "English",
volume = "6",
pages = "1802--1816",
journal = "Physica status solidi / C",
issn = "1862-6351",
publisher = "Wiley-VCH",
}
TY - JOUR
T1 - Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing(RTP)
AU - Matylitskaya, Volha
AU - Brunkahl, Oliver
AU - Kothleitner, Gerald
AU - Bock, Wolfgang
AU - Bernd, Kolbesen
PY - 2007
Y1 - 2007
U2 - 10.1002/pssc.200675231
DO - 10.1002/pssc.200675231
M3 - Article
VL - 6
SP - 1802
EP - 1816
JO - Physica status solidi / C
JF - Physica status solidi / C
SN - 1862-6351
ER -