Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing(RTP)

Volha Matylitskaya, Oliver Brunkahl, Gerald Kothleitner, Wolfgang Bock, Kolbesen Bernd

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)1802-1816
JournalPhysica status solidi / C
Volume6
DOIs
Publication statusPublished - 2007

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Cite this

Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing(RTP). / Matylitskaya, Volha; Brunkahl, Oliver; Kothleitner, Gerald; Bock, Wolfgang; Bernd, Kolbesen.

In: Physica status solidi / C, Vol. 6, 2007, p. 1802-1816.

Research output: Contribution to journalArticleResearchpeer-review

Matylitskaya, Volha ; Brunkahl, Oliver ; Kothleitner, Gerald ; Bock, Wolfgang ; Bernd, Kolbesen. / Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing(RTP). In: Physica status solidi / C. 2007 ; Vol. 6. pp. 1802-1816.
@article{11ef31db21e6491cae167cf1b19f86f0,
title = "Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing(RTP)",
author = "Volha Matylitskaya and Oliver Brunkahl and Gerald Kothleitner and Wolfgang Bock and Kolbesen Bernd",
year = "2007",
doi = "10.1002/pssc.200675231",
language = "English",
volume = "6",
pages = "1802--1816",
journal = "Physica status solidi / C",
issn = "1862-6351",
publisher = "Wiley-VCH",

}

TY - JOUR

T1 - Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing(RTP)

AU - Matylitskaya, Volha

AU - Brunkahl, Oliver

AU - Kothleitner, Gerald

AU - Bock, Wolfgang

AU - Bernd, Kolbesen

PY - 2007

Y1 - 2007

U2 - 10.1002/pssc.200675231

DO - 10.1002/pssc.200675231

M3 - Article

VL - 6

SP - 1802

EP - 1816

JO - Physica status solidi / C

JF - Physica status solidi / C

SN - 1862-6351

ER -