Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing(RTP)

Volha Matylitskaya, Oliver Brunkahl, Gerald Kothleitner, Wolfgang Bock, Kolbesen Bernd

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@article{11ef31db21e6491cae167cf1b19f86f0,

title = "Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing(RTP)",

author = "Volha Matylitskaya and Oliver Brunkahl and Gerald Kothleitner and Wolfgang Bock and Kolbesen Bernd",

year = "2007",

doi = "10.1002/pssc.200675231",

language = "English",

volume = "6",

pages = "1802--1816",

journal = "Physica Status Solidi / C",

issn = "1610-1634",

publisher = "Wiley-VCH ",

}

TY - JOUR

T1 - Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing(RTP)

AU - Matylitskaya, Volha

AU - Brunkahl, Oliver

AU - Kothleitner, Gerald

AU - Bock, Wolfgang

AU - Bernd, Kolbesen

PY - 2007

Y1 - 2007

U2 - 10.1002/pssc.200675231

DO - 10.1002/pssc.200675231

M3 - Article

VL - 6

SP - 1802

EP - 1816

JO - Physica Status Solidi / C

JF - Physica Status Solidi / C

SN - 1610-1634

ER -