Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing(RTP)

Volha Matylitskaya, Oliver Brunkahl, Gerald Kothleitner, Wolfgang Bock, Kolbesen Bernd

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1802-1816
JournalPhysica Status Solidi (C) - Current Topics in Solid State Physics
Publication statusPublished - 2007

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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