Understanding wafer patterns in semiconductor production with variational auto-encoders.

Tiago Teixeira dos Santos, Roman Kern

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationProc. 26th European Symp. on Artificial Neural Networks, Computational Intelligence and Machine Learning (ESANN)
Publication statusPublished - 2018

Cite this

Teixeira dos Santos, T., & Kern, R. (2018). Understanding wafer patterns in semiconductor production with variational auto-encoders. In Proc. 26th European Symp. on Artificial Neural Networks, Computational Intelligence and Machine Learning (ESANN)