Three-Dimensional Focused Electron Beam Induced Deposition: Design, Simulation and Experiments

Jason D. Fowlkes, Brett B. Lewis, E. Mutunga, P. Rack, Michael Stanford, Harald Plank, Robert Winkler

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationThe 61 st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication
Chapter1B1
Number of pages2
Publication statusPublished - 30 May 2017
EventThe 61st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication 2017 - Walt Disney World Coronado Springs Resort, Orlando, Florida, United States
Duration: 30 May 20172 Jun 2017

Conference

ConferenceThe 61st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication 2017
Abbreviated title EIPBN 2017
CountryUnited States
CityOrlando, Florida
Period30/05/172/06/17

ASJC Scopus subject areas

  • Materials Science(all)

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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