| Original language | English |
|---|---|
| Pages (from-to) | 233-238 |
| Journal | Macromolecular rapid communications |
| Volume | 37 |
| Publication status | Published - 2016 |
Fields of Expertise
- Advanced Materials Science
Treatment code (Nähere Zuordnung)
- Basic - Fundamental (Grundlagenforschung)
- Experimental
Cite this
Fimberger, M., Behrendt, A., Jakopic, G., Stelzer, F., Kumbaraci, V., & Wiesbrock, F. (2016). Modification Pathways for Copoly(2-oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography. Macromolecular rapid communications, 37, 233-238.
Modification Pathways for Copoly(2-oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography. / Fimberger, Martin; Behrendt, Andreas; Jakopic, Georg; Stelzer, Franz; Kumbaraci, Volkan; Wiesbrock, Frank.
In: Macromolecular rapid communications, Vol. 37, 2016, p. 233-238.Research output: Contribution to journal › Article › Research › peer-review
Fimberger, M, Behrendt, A, Jakopic, G, Stelzer, F, Kumbaraci, V & Wiesbrock, F 2016, 'Modification Pathways for Copoly(2-oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography' Macromolecular rapid communications, vol. 37, pp. 233-238.
Fimberger M, Behrendt A, Jakopic G, Stelzer F, Kumbaraci V, Wiesbrock F. Modification Pathways for Copoly(2-oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography. Macromolecular rapid communications. 2016;37:233-238.
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title = "Modification Pathways for Copoly(2-oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography",
author = "Martin Fimberger and Andreas Behrendt and Georg Jakopic and Franz Stelzer and Volkan Kumbaraci and Frank Wiesbrock",
year = "2016",
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volume = "37",
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journal = "Macromolecular rapid communications",
issn = "1022-1336",
publisher = "Wiley-VCH",
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T1 - Modification Pathways for Copoly(2-oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography
AU - Fimberger, Martin
AU - Behrendt, Andreas
AU - Jakopic, Georg
AU - Stelzer, Franz
AU - Kumbaraci, Volkan
AU - Wiesbrock, Frank
PY - 2016
Y1 - 2016
M3 - Article
VL - 37
SP - 233
EP - 238
JO - Macromolecular rapid communications
JF - Macromolecular rapid communications
SN - 1022-1336
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