Modification Pathways for Copoly(2-oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography

Martin Fimberger, Andreas Behrendt, Georg Jakopic, Franz Stelzer, Volkan Kumbaraci, Frank Wiesbrock

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	233-238
Journal	Macromolecular Rapid Communications
Volume	37
Publication status	Published - 2016

Fields of Expertise

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title = "Modification Pathways for Copoly(2-oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography",

author = "Martin Fimberger and Andreas Behrendt and Georg Jakopic and Franz Stelzer and Volkan Kumbaraci and Frank Wiesbrock",

year = "2016",

language = "English",

volume = "37",

pages = "233--238",

journal = "Macromolecular Rapid Communications",

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T1 - Modification Pathways for Copoly(2-oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography

AU - Fimberger, Martin

AU - Behrendt, Andreas

AU - Jakopic, Georg

AU - Stelzer, Franz

AU - Kumbaraci, Volkan

AU - Wiesbrock, Frank

PY - 2016

Y1 - 2016

M3 - Article

VL - 37

SP - 233

EP - 238

JO - Macromolecular Rapid Communications

JF - Macromolecular Rapid Communications

SN - 1022-1336

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