Modification Pathways for Copoly(2-oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography

Martin Fimberger, Andreas Behrendt, Georg Jakopic, Franz Stelzer, Volkan Kumbaraci, Frank Wiesbrock

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)233-238
JournalMacromolecular Rapid Communications
Volume37
Publication statusPublished - 2016

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)
  • Experimental

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