Modification Pathways for Copoly(2-oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography

Martin Fimberger, Andreas Behrendt, Georg Jakopic, Franz Stelzer, Volkan Kumbaraci, Frank Wiesbrock

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)233-238
JournalMacromolecular rapid communications
Volume37
Publication statusPublished - 2016

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)
  • Experimental

Cite this

Modification Pathways for Copoly(2-oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography. / Fimberger, Martin; Behrendt, Andreas; Jakopic, Georg; Stelzer, Franz; Kumbaraci, Volkan; Wiesbrock, Frank.

In: Macromolecular rapid communications, Vol. 37, 2016, p. 233-238.

Research output: Contribution to journalArticleResearchpeer-review

@article{6d612d7aa7d14025a66f949053d14df4,
title = "Modification Pathways for Copoly(2-oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography",
author = "Martin Fimberger and Andreas Behrendt and Georg Jakopic and Franz Stelzer and Volkan Kumbaraci and Frank Wiesbrock",
year = "2016",
language = "English",
volume = "37",
pages = "233--238",
journal = "Macromolecular rapid communications",
issn = "1022-1336",
publisher = "Wiley-VCH",

}

TY - JOUR

T1 - Modification Pathways for Copoly(2-oxazoline)s Enabling Their Application as Antireflective Coatings in Photolithography

AU - Fimberger, Martin

AU - Behrendt, Andreas

AU - Jakopic, Georg

AU - Stelzer, Franz

AU - Kumbaraci, Volkan

AU - Wiesbrock, Frank

PY - 2016

Y1 - 2016

M3 - Article

VL - 37

SP - 233

EP - 238

JO - Macromolecular rapid communications

JF - Macromolecular rapid communications

SN - 1022-1336

ER -