Deep X-ray Lithography for Material Science

Benedetta Marmiroli, Luca Malfatti, Ludovic F Dumee, Sang Hoon Han, Plinio Innocenzi, Paolo Falcaro, Heinz Amenitsch

Research output: Contribution to conferencePosterResearch

Original languageEnglish
Publication statusPublished - 2013
EventNanotech Italy 2013 - Venezia
Duration: 27 Nov 201329 Nov 2013


ConferenceNanotech Italy 2013

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Experimental
  • Review
  • Application

Cite this

Marmiroli, B., Malfatti, L., Dumee, L. F., Han, S. H., Innocenzi, P., Falcaro, P., & Amenitsch, H. (2013). Deep X-ray Lithography for Material Science. Poster session presented at Nanotech Italy 2013, Venezia, .