Deep X-ray Lithography for interdisciplinary research

Research output: Contribution to conferencePosterResearchpeer-review

Original languageEnglish
Publication statusPublished - 2016
EventNESY Symposium 2016 - Institute of Inorganic Chemistry, Graz university of Technology, Graz, Austria
Duration: 15 Sep 201616 Dec 2016

Conference

ConferenceNESY Symposium 2016
CountryAustria
CityGraz
Period15/09/1616/12/16

Keywords

  • Lithography

ASJC Scopus subject areas

  • Materials Science(all)
  • Chemistry(all)
  • Physics and Astronomy(all)

Fields of Expertise

  • Advanced Materials Science

Cite this

Marmiroli, B., Turchet, A., Sartori, B., & Amenitsch, H. (2016). Deep X-ray Lithography for interdisciplinary research. Poster session presented at NESY Symposium 2016, Graz, Austria.

Deep X-ray Lithography for interdisciplinary research. / Marmiroli, Benedetta; Turchet, Alessio; Sartori, Barbara; Amenitsch, Heinz.

2016. Poster session presented at NESY Symposium 2016, Graz, Austria.

Research output: Contribution to conferencePosterResearchpeer-review

Marmiroli, B, Turchet, A, Sartori, B & Amenitsch, H 2016, 'Deep X-ray Lithography for interdisciplinary research' NESY Symposium 2016, Graz, Austria, 15/09/16 - 16/12/16, .
Marmiroli B, Turchet A, Sartori B, Amenitsch H. Deep X-ray Lithography for interdisciplinary research. 2016. Poster session presented at NESY Symposium 2016, Graz, Austria.
Marmiroli, Benedetta ; Turchet, Alessio ; Sartori, Barbara ; Amenitsch, Heinz. / Deep X-ray Lithography for interdisciplinary research. Poster session presented at NESY Symposium 2016, Graz, Austria.
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title = "Deep X-ray Lithography for interdisciplinary research",
keywords = "Lithography",
author = "Benedetta Marmiroli and Alessio Turchet and Barbara Sartori and Heinz Amenitsch",
year = "2016",
language = "English",
note = "NESY Symposium 2016 ; Conference date: 15-09-2016 Through 16-12-2016",

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TY - CONF

T1 - Deep X-ray Lithography for interdisciplinary research

AU - Marmiroli, Benedetta

AU - Turchet, Alessio

AU - Sartori, Barbara

AU - Amenitsch, Heinz

PY - 2016

Y1 - 2016

KW - Lithography

M3 - Poster

ER -