Deep X-ray lithography for direct patterning of PECVD films

Stefano Costacurta, Luca Malfatti, Alessandro Patelli, Paolo Falcaro, Heinz Amenitsch, Benedetta Marmiroli, Gianluca Grenci, Massimo Piccinini, Plinio Innocenzi*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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Material Science