Original language | English |
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Title of host publication | SPIE International Symposium Optical Metrology |
Publisher | . |
Pages | 176-182 |
Publication status | Published - 1992 |
Treatment code (Nähere Zuordnung)
- Basic - Fundamental (Grundlagenforschung)
- Experimental
Jakob Woisetschläger, Daniel B. Sheffer, Kavitha Somasundaram, Hala Mikati, C. William Loughry, Surendra R. Chawla, Piotr J. Wesolowksi
Research output: Chapter in Book/Report/Conference proceeding › Conference paper
Original language | English |
---|---|
Title of host publication | SPIE International Symposium Optical Metrology |
Publisher | . |
Pages | 176-182 |
Publication status | Published - 1992 |