| Original language | English |
|---|---|
| Pages (from-to) | 2430-ff |
| Journal | Journal of Vacuum Science and Technology / A |
| Volume | A5 |
| Publication status | Published - 1987 |
Treatment code (Nähere Zuordnung)
- Basic - Fundamental (Grundlagenforschung)
- Experimental
Absolute Calibration of Small Gas Amounts
Research output: Contribution to journal › Article › peer-review