Absolute Calibration of Small Gas Amounts

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)2430-ff
JournalJournal of Vacuum Science and Technology / A
VolumeA5
Publication statusPublished - 1987

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)
  • Experimental

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