SAW_BAW - High quality AIN based piezoelectric thin-films for SAW and BAW applications

Project: Research project

Project Details


Piezoelectric materials such as AIN, AIScN are of great interest for RF-filter devices provided an adequate qualtiy of the layer can be ensured.
Effective start/end date1/01/2031/12/22


Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.