Flatness-based deposition rate control of thermally evaporated organic semiconductors

Publikation: Beitrag in einer FachzeitschriftArtikelForschungBegutachtung

Abstract

The most crucial step in manufacturing organic electronic devices is the deposition of the active organic layers. This deposition is mostly achieved by thermal evaporation of special organic materials out of an evaporation cell in a high-vacuum environment. The major goal is to produce a thin layer with a well-defined deposition rate. In this study, a mathematical model of the deposition process is presented and a procedure for identifying the unknown model parameters is given. The model covers the transient evaporation of organic materials as well as the thermal behaviour of the evaporation source. A control law based on the concepts of differential flatness turned out to be superior to conventional control strategies. The controller is tested on a real world high-vacuum system using two different evaporation materials. Finally, it is demonstrated, that the proposed approach yields improved layer morphologies that are the basis of outstanding device characteristics.
Originalspracheenglisch
Seiten (von - bis)210-217
FachzeitschriftIET control theory & applications
Jahrgang7
Ausgabenummer2
DOIs
PublikationsstatusVeröffentlicht - 2013

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Organic Semiconductors
Semiconducting organic compounds
Rate Control
Flatness
Evaporation
Deposition rates
Vacuum
Thermal evaporation
Thin Layer
Control Strategy
Mathematical models
Well-defined
Controllers
Manufacturing
Electronics
Cover
Mathematical Model
Controller
Unknown
Cell

Fields of Expertise

  • Advanced Materials Science

Dies zitieren

Flatness-based deposition rate control of thermally evaporated organic semiconductors. / Steinberger, Martin; Horn, Martin; Fian, Alexander.

in: IET control theory & applications, Jahrgang 7, Nr. 2, 2013, S. 210-217.

Publikation: Beitrag in einer FachzeitschriftArtikelForschungBegutachtung

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