Width determination of SiO2 films in Si-based devices using low-loss EFTEM: image contrast as a function of sample thickness

Bernhard Schaffer, Werner Grogger, Ferdinand Hofer

Institute of Electron Microscopy and Nanoanalysis (5190)

Research output: Contribution to journal › Article › peer-review

2 results

Finished
Analytical Characterization of Thin Layers and Interfaces Between Thin Layers in Semiconducting Materials Devices and Magnetic Multilayers by Means of EELS and EFTEM
Grogger, W., Hofer, F., Brunegger, A., Warbichler, P. & Kothleitner, G.
1/01/99 → 31/12/05
Project: Research area
Analytical Electron Microscopy
Schaffer, B., Hofer, F., Rogers, M., Mitterbauer, C. & Wewerka, K.
1/01/95 → 31/01/03
Project: Research area