Width determination of SiO2 films in Si-based devices using low-loss EFTEM: image contrast as a function of sample thickness

Bernhard Schaffer, Werner Grogger, Ferdinand Hofer

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1-7
JournalMicron
Issue number34
Publication statusPublished - 2003

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Projects

Analytical Electron Microscopy

Schaffer, B., Hofer, F., Rogers, M., Mitterbauer, C. & Wewerka, K.

1/01/9531/01/03

Project: Research area

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