Width determination of SiO2 films in Si-based devices using low-loss EFTEM: image contrast as a function of sample thickness

Bernhard Schaffer, Werner Grogger, Ferdinand Hofer

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)1-7
JournalMicron
Issue number34
Publication statusPublished - 2003

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Cite this