Wet etching of silicon nitride - Etch rates, selectivity and investigation of the etching mechanism

Melanie Wolf, [No Value] Fischer R

Research output: Contribution to conference(Old data) Lecture or PresentationResearch

Original languageGerman
Publication statusPublished - 14 Nov 2012
Event2nd LAM Research Technology Seminar - Graz, Austria
Duration: 14 Nov 201214 Nov 2012

Conference

Conference2nd LAM Research Technology Seminar
CountryAustria
CityGraz
Period14/11/1214/11/12

Fields of Expertise

  • Sonstiges

Cite this

Wolf, M., & Fischer R, N. V. (2012). Wet etching of silicon nitride - Etch rates, selectivity and investigation of the etching mechanism. 2nd LAM Research Technology Seminar, Graz, Austria.

Wet etching of silicon nitride - Etch rates, selectivity and investigation of the etching mechanism. / Wolf, Melanie; Fischer R, [No Value].

2012. 2nd LAM Research Technology Seminar, Graz, Austria.

Research output: Contribution to conference(Old data) Lecture or PresentationResearch

Wolf, M & Fischer R, NV 2012, 'Wet etching of silicon nitride - Etch rates, selectivity and investigation of the etching mechanism' 2nd LAM Research Technology Seminar, Graz, Austria, 14/11/12 - 14/11/12, .
Wolf M, Fischer R NV. Wet etching of silicon nitride - Etch rates, selectivity and investigation of the etching mechanism. 2012. 2nd LAM Research Technology Seminar, Graz, Austria.
Wolf, Melanie ; Fischer R, [No Value]. / Wet etching of silicon nitride - Etch rates, selectivity and investigation of the etching mechanism. 2nd LAM Research Technology Seminar, Graz, Austria.
@conference{9dd68245ef7c407dbf8551fd76fdb7b3,
title = "Wet etching of silicon nitride - Etch rates, selectivity and investigation of the etching mechanism",
author = "Melanie Wolf and {Fischer R}, {[No Value]}",
year = "2012",
month = "11",
day = "14",
language = "deutsch",
note = "null ; Conference date: 14-11-2012 Through 14-11-2012",

}

TY - CONF

T1 - Wet etching of silicon nitride - Etch rates, selectivity and investigation of the etching mechanism

AU - Wolf, Melanie

AU - Fischer R, [No Value]

PY - 2012/11/14

Y1 - 2012/11/14

M3 - (Altdaten) Vortrag oder Präsentation

ER -