Wet etching of silicon nitride - Etch rates, selectivity and investigation of the etching mechanism

Melanie Wolf, [No Value] Fischer R

Research output: Contribution to conference(Old data) Lecture or Presentation

Original languageGerman
Publication statusPublished - 14 Nov 2012
Event2nd LAM Research Technology Seminar - Graz, Austria
Duration: 14 Nov 201214 Nov 2012

Conference

Conference2nd LAM Research Technology Seminar
CountryAustria
CityGraz
Period14/11/1214/11/12

Fields of Expertise

  • Sonstiges

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