Verfahren zur Herstellung von Hydridosilanen

Stephan Wieber (Inventor), Matthias Patz (Inventor), Martin Trocha (Inventor), Hartwig Rauleder (Inventor), Ekkehard Müh (Inventor), Harald Stüger (Inventor), Christoph Walkner (Inventor)

Research output: Patent

Original languageGerman
Patent numberDE 102009053804 B3
Publication statusPublished - 17 Mar 2011

Fields of Expertise

  • Advanced Materials Science

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