Universal software for the real-time control of sequential processing techniques

Julian Pilz, Martin Tazreiter, Anna Maria Coclite

Research output: Contribution to journalArticle

Original languageEnglish
Article number063201
JournalJournal of Vacuum Science and Technology / A
Volume37
Issue number6
DOIs
Publication statusPublished - 1 Nov 2019

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cooperations

  • NAWI Graz

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