Towards pure and compact FEBID deposits via e-beam assisted H2O purification at room temperature

Barbara Geier, Christian Gspan, J.D. Fowlkes, P.D. Rack, Harald Plank

Research output: Contribution to conferencePoster

Original languageEnglish
Publication statusPublished - 2014
Event18th IMC 2014 Prag - Prag, Czech Republic
Duration: 7 Sep 201412 Sep 2014

Conference

Conference18th IMC 2014 Prag
CountryCzech Republic
CityPrag
Period7/09/1412/09/14

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Cite this

Geier, B., Gspan, C., Fowlkes, J. D., Rack, P. D., & Plank, H. (2014). Towards pure and compact FEBID deposits via e-beam assisted H2O purification at room temperature. Poster session presented at 18th IMC 2014 Prag, Prag, Czech Republic.