The Nanoscale Implications of a Molecular Gas Beam during Electron Beam Induced Deposition

Robert Winkler, Jason D. Fowlkes, Aleksandra Szkudlarek, Ivo Utke, Philip D. Rack, Harald Plank

Research output: Contribution to journalArticle

Original languageGerman
Pages (from-to)2987-2995
JournalACS Applied Materials & Interfaces
Volume6
DOIs
Publication statusPublished - 2014

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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