Temperature Induced Effects on Laser Speckle in a Laser Measurement Device

Christian Mentin, Eugen Brenner, Robin Priewald

Research output: Contribution to conferencePosterResearchpeer-review

Abstract

Semiconductor manufacturers are seeking for
fast and precise
measurements of the wafer edge. Especially when wafers are getting thinner, the more likely they break. This breakage could be caused by insensitive handling or originate from broken and chipped wafer edges. A novel contactless screening laser Wafer Edge Screener micrometer, called Wafer Edge Screener, which inspects wafer edges during common pre-alignment processes, can profile the wafer edge thickness and quantify upper and lower edge defects. The proposed measurement setup relies on multiple exposures of the wafer edge onto a light sensitive detector using point light sources, such as Laserdiodes. By evaluating the projected edge position on the light sensitive detector, the X/Y position of the wafer edge can be determined. The overall measurement accuracy is strongly influenced by the edge prediction techniques used, the light source, and furthermore some other parasitic effects. To achieve subpixel accuracy for determining the projected edge position on the detector, effects regarding laser speckles were investigated. In the test setup, a thin edge was continuously moved in parallel to the sensor, which results in a continuous movement of the projected diffraction pattern and its contained features on the sensor. By tracking these features, irregularities of their movement caused by temperature dependent Laser speckle can be investigated.
Original languageEnglish
Publication statusPublished - 22 Nov 2017
Event3rd International Conference on Integrated Functional Nano Systems - KFU Graz, Graz, Austria
Duration: 22 Nov 201724 Nov 2017
http://nanofis.net/

Conference

Conference3rd International Conference on Integrated Functional Nano Systems
Abbreviated titlenanoFis 2017
CountryAustria
CityGraz
Period22/11/1724/11/17
Internet address

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Keywords

  • Laser speckle;

Cite this

Mentin, C., Brenner, E., & Priewald, R. (2017). Temperature Induced Effects on Laser Speckle in a Laser Measurement Device. Poster session presented at 3rd International Conference on Integrated Functional Nano Systems, Graz, Austria.