TEM, EELS, and EFTEM: Application to Semiconductor Materials and Device Characterization

Werner Grogger, Christian Gspan, Bernhard Schaffer, Martina Dienstleder, Michael Rogers, Albert Brunegger, Ferdinand Hofer

Research output: Contribution to conference(Old data) Lecture or Presentation

Original languageEnglish
Publication statusPublished - 15 Sep 2005
EventCrystalline Defects and Contamination: Their impact and Control in Device Manufacturing IV - Grenoble
Duration: 15 Sep 200516 Sep 2005

Conference

ConferenceCrystalline Defects and Contamination: Their impact and Control in Device Manufacturing IV
CityGrenoble
Period15/09/0516/09/05

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