TEM, EELS and EFTEM: Application to Semiconductor Materials and Device Characterization

Werner Grogger, Bernhard Schaffer, Ferdinand Hofer

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

Original languageEnglish
Title of host publicationCrystalline Defects and Contamination: DECON 2005
Place of PublicationPennington, USA
PublisherThe Electrochemical Society
Pages106-112
Volume4
ISBN (Print)1-56677-428-4
Publication statusPublished - 2005
EventDECON2005 - Grenoble, France
Duration: 15 Sep 200516 Sep 2005

Publication series

NameTheir Impact and Control in Device Manufacturing IV
PublisherThe Electrochemical Society

Conference

ConferenceDECON2005
CountryFrance
CityGrenoble
Period15/09/0516/09/05

Treatment code (Nähere Zuordnung)

  • Experimental
  • Review

Cite this

Grogger, W., Schaffer, B., & Hofer, F. (2005). TEM, EELS and EFTEM: Application to Semiconductor Materials and Device Characterization. In Crystalline Defects and Contamination: DECON 2005 (Vol. 4, pp. 106-112). (Their Impact and Control in Device Manufacturing IV). Pennington, USA: The Electrochemical Society.

TEM, EELS and EFTEM: Application to Semiconductor Materials and Device Characterization. / Grogger, Werner; Schaffer, Bernhard; Hofer, Ferdinand.

Crystalline Defects and Contamination: DECON 2005. Vol. 4 Pennington, USA : The Electrochemical Society, 2005. p. 106-112 (Their Impact and Control in Device Manufacturing IV).

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

Grogger, W, Schaffer, B & Hofer, F 2005, TEM, EELS and EFTEM: Application to Semiconductor Materials and Device Characterization. in Crystalline Defects and Contamination: DECON 2005. vol. 4, Their Impact and Control in Device Manufacturing IV, The Electrochemical Society, Pennington, USA, pp. 106-112, DECON2005, Grenoble, France, 15/09/05.
Grogger W, Schaffer B, Hofer F. TEM, EELS and EFTEM: Application to Semiconductor Materials and Device Characterization. In Crystalline Defects and Contamination: DECON 2005. Vol. 4. Pennington, USA: The Electrochemical Society. 2005. p. 106-112. (Their Impact and Control in Device Manufacturing IV).
Grogger, Werner ; Schaffer, Bernhard ; Hofer, Ferdinand. / TEM, EELS and EFTEM: Application to Semiconductor Materials and Device Characterization. Crystalline Defects and Contamination: DECON 2005. Vol. 4 Pennington, USA : The Electrochemical Society, 2005. pp. 106-112 (Their Impact and Control in Device Manufacturing IV).
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