TEM, EELS and EFTEM: Application to Semiconductor Materials and Device Characterization

Werner Grogger, Bernhard Schaffer, Ferdinand Hofer

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

Original languageEnglish
Title of host publicationCrystalline Defects and Contamination: DECON 2005
Place of PublicationPennington, USA
PublisherThe Electrochemical Society
Pages106-112
Volume4
ISBN (Print)1-56677-428-4
Publication statusPublished - 2005
EventDECON2005 - Grenoble, France
Duration: 15 Sep 200516 Sep 2005

Publication series

NameTheir Impact and Control in Device Manufacturing IV
PublisherThe Electrochemical Society

Conference

ConferenceDECON2005
CountryFrance
CityGrenoble
Period15/09/0516/09/05

Treatment code (Nähere Zuordnung)

  • Experimental
  • Review

Cite this

Grogger, W., Schaffer, B., & Hofer, F. (2005). TEM, EELS and EFTEM: Application to Semiconductor Materials and Device Characterization. In Crystalline Defects and Contamination: DECON 2005 (Vol. 4, pp. 106-112). (Their Impact and Control in Device Manufacturing IV). Pennington, USA: The Electrochemical Society.