Surface Characterization of Silicon Wafers

Research output: Contribution to conference(Old data) Lecture or Presentation

Original languageGerman
Publication statusPublished - 17 Nov 2010
EventChemistry and Technology of Materials - TU Graz, Austria
Duration: 14 Jan 2010 → …

Conference

ConferenceChemistry and Technology of Materials
CountryAustria
CityTU Graz
Period14/01/10 → …

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)
  • Experimental

Cite this

Bodner, T., Wiesbrock, F., & Stelzer, F. (2010). Surface Characterization of Silicon Wafers. Chemistry and Technology of Materials, TU Graz, Austria.