Surface Characterization of Silicon Wafers

Research output: Contribution to conference(Old data) Lecture or Presentation

Original languageGerman
Publication statusPublished - 7 Jun 2011
EventDoc Days 2011 - Graz
Duration: 7 Jun 20119 Jun 2011

Conference

ConferenceDoc Days 2011
CityGraz
Period7/06/119/06/11

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)
  • Experimental

Projects

Surface chemistry and adhesive properties of designed photoresist polymers

Fimberger, M., Mühlbacher, I., Stelzer, F., Schenk, V. & Wiesbrock, F.

1/01/1031/12/13

Project: Research project

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