Surface analysis of dielectric films by time of flight mass spectrometry

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

Original languageEnglish
Title of host publication3rd European Vacuum Conference Conference Handbook
Place of PublicationWien
Publisher.
PagesA 67-A 67
Publication statusPublished - 1991
EventEuropean Vacuum Conference - Wien, Austria
Duration: 23 Sep 199127 Sep 1991

Conference

ConferenceEuropean Vacuum Conference
CountryAustria
CityWien
Period23/09/9127/09/91

Treatment code (Nähere Zuordnung)

  • Application
  • Experimental

Cite this

Leisch, M., & Rendulic, K. (1991). Surface analysis of dielectric films by time of flight mass spectrometry. In 3rd European Vacuum Conference Conference Handbook (pp. A 67-A 67). Wien: ..