Spatial chemistry evolution during focused electron beam-induced deposition: origins and workarounds

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1675-1688
JournalApplied Physics / A
DOIs
Publication statusPublished - 2014

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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