Spatial chemistry evolution during focused electron beam-induced deposition: origins and workarounds

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@article{9589dfff229b48c78ae38c924d665d9c,

title = "Spatial chemistry evolution during focused electron beam-induced deposition: origins and workarounds",

author = "Robert Winkler and Barbara Geier and Harald Plank",

year = "2014",

doi = "10.1007/s00339-014-8496-y",

language = "English",

pages = "1675--1688",

journal = "Applied Physics / A",

issn = "0947-8396",

publisher = "Springer Heidelberg",

}