Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition

Jason D. Fowlkes; Robert Winkler; Brett B. Lewis; Michael Stanford; Harald Plank; Philip Rack

doi:10.1021/acsnano.6b02108

Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition

Jason D. Fowlkes, Robert Winkler, Brett B. Lewis, Michael Stanford, Harald Plank, Philip Rack

Institute of Electron Microscopy and Nanoanalysis (5190)

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	6163-6172
Number of pages	9
Journal	ACS Nano
Volume	10
DOIs	https://doi.org/10.1021/acsnano.6b02108
Publication status	Published - 2016

ASJC Scopus subject areas

Materials Science(all)

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)

Access to Document

10.1021/acsnano.6b02108

SENTINEL - Self-Sensing Nanoprobes for Electric and Thermal In-Situ Characterization in Electron Microscopes
Plank, H.
1/10/15 → 30/09/17
Project: Research project
Functional Nanofabrication
Dohr, J., Plank, H., Rosker, S., Winkler, R., Stermitz, M., Reisecker, V., Michelitsch, S. G. W., Brugger-Hatzl, M., Schmied, R., Eicher, B., Orthacker, A., Arnold, G., Sattelkow, J., Kolb, F., Ganner, T., Haselmann, U., Seewald, L. & Aschl, T.
1/01/09 → 31/12/23
Project: Research project

Cite this

@article{51c134c602df4114b8506193cde92906,

title = "Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition",

author = "Fowlkes, {Jason D.} and Robert Winkler and Lewis, {Brett B.} and Michael Stanford and Harald Plank and Philip Rack",

year = "2016",

doi = "10.1021/acsnano.6b02108",

language = "English",

volume = "10",

pages = "6163--6172",

journal = "ACS Nano",

issn = "1936-086X ",

publisher = "American Chemical Society",

}

TY - JOUR

T1 - Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition

AU - Fowlkes, Jason D.

AU - Winkler, Robert

AU - Lewis, Brett B.

AU - Stanford, Michael

AU - Plank, Harald

AU - Rack, Philip

PY - 2016

Y1 - 2016

U2 - 10.1021/acsnano.6b02108

DO - 10.1021/acsnano.6b02108

M3 - Article

SN - 1936-086X

VL - 10

SP - 6163

EP - 6172

JO - ACS Nano

JF - ACS Nano

ER -

Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition

ASJC Scopus subject areas

Fields of Expertise

Treatment code (Nähere Zuordnung)

Access to Document

Projects

SENTINEL - Self-Sensing Nanoprobes for Electric and Thermal In-Situ Characterization in Electron Microscopes

Functional Nanofabrication

Cite this