Simulating the pressure limiting system of Environmental Scanning Electron Microscopes using the direct simulation Monte-Carlo method

Research output: Contribution to conferenceAbstract

Original languageEnglish
Pages25-25
Publication statusPublished - 2015
Event5th ASEM Workshop - Graz, Austria
Duration: 7 Jun 20158 Jun 2015

Conference

Conference5th ASEM Workshop
CountryAustria
CityGraz
Period7/06/158/06/15

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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