Scheduling of Foreline Maintanance on a CVD Tool Based on FDC Parameter

Günter Hayderer, Marlies Radl, Peter Scheibelhofer, Ernst Stadlober, Hendrik Purwins, T. Purwins, Dietmar Gleispach

Research output: Contribution to conferencePoster

Conference

Conference10th European Advanced Equipment Control AEC/APC Conference
CityCatania, Sizilien
Period28/04/1030/04/10

Treatment code (Nähere Zuordnung)

  • Experimental

Cite this

Hayderer, G., Radl, M., Scheibelhofer, P., Stadlober, E., Purwins, H., Purwins, T., & Gleispach, D. (2010). Scheduling of Foreline Maintanance on a CVD Tool Based on FDC Parameter. Poster session presented at 10th European Advanced Equipment Control AEC/APC Conference, Catania, Sizilien, .

Scheduling of Foreline Maintanance on a CVD Tool Based on FDC Parameter. / Hayderer, Günter; Radl, Marlies; Scheibelhofer, Peter; Stadlober, Ernst; Purwins, Hendrik; Purwins, T.; Gleispach, Dietmar.

2010. Poster session presented at 10th European Advanced Equipment Control AEC/APC Conference, Catania, Sizilien, .

Research output: Contribution to conferencePoster

Hayderer, G, Radl, M, Scheibelhofer, P, Stadlober, E, Purwins, H, Purwins, T & Gleispach, D 2010, 'Scheduling of Foreline Maintanance on a CVD Tool Based on FDC Parameter' 10th European Advanced Equipment Control AEC/APC Conference, Catania, Sizilien, 28/04/10 - 30/04/10, .
Hayderer G, Radl M, Scheibelhofer P, Stadlober E, Purwins H, Purwins T et al. Scheduling of Foreline Maintanance on a CVD Tool Based on FDC Parameter. 2010. Poster session presented at 10th European Advanced Equipment Control AEC/APC Conference, Catania, Sizilien, .
Hayderer, Günter ; Radl, Marlies ; Scheibelhofer, Peter ; Stadlober, Ernst ; Purwins, Hendrik ; Purwins, T. ; Gleispach, Dietmar. / Scheduling of Foreline Maintanance on a CVD Tool Based on FDC Parameter. Poster session presented at 10th European Advanced Equipment Control AEC/APC Conference, Catania, Sizilien, .
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title = "Scheduling of Foreline Maintanance on a CVD Tool Based on FDC Parameter",
author = "G{\"u}nter Hayderer and Marlies Radl and Peter Scheibelhofer and Ernst Stadlober and Hendrik Purwins and T. Purwins and Dietmar Gleispach",
year = "2010",
language = "English",
note = "10th European Advanced Equipment Control AEC/APC Conference ; Conference date: 28-04-2010 Through 30-04-2010",

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TY - CONF

T1 - Scheduling of Foreline Maintanance on a CVD Tool Based on FDC Parameter

AU - Hayderer,Günter

AU - Radl,Marlies

AU - Scheibelhofer,Peter

AU - Stadlober,Ernst

AU - Purwins,Hendrik

AU - Purwins,T.

AU - Gleispach,Dietmar

PY - 2010

Y1 - 2010

UR - http://www.aecapc-europe.com

M3 - Poster

ER -