Scheduling of Foreline Maintanance on a CVD Tool Based on FDC Parameter

Günter Hayderer, Marlies Radl, Peter Scheibelhofer, Ernst Stadlober, Hendrik Purwins, T. Purwins, Dietmar Gleispach

Research output: Contribution to conference › Poster

Original language	English
Publication status	Published - 2010
Event	10th European Advanced Equipment Control AEC/APC Conference - Catania, Sizilien Duration: 28 Apr 2010 → 30 Apr 2010

Conference	10th European Advanced Equipment Control AEC/APC Conference
City	Catania, Sizilien
Period	28/04/10 → 30/04/10

Treatment code (Nähere Zuordnung)

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title = "Scheduling of Foreline Maintanance on a CVD Tool Based on FDC Parameter",

author = "G{\"u}nter Hayderer and Marlies Radl and Peter Scheibelhofer and Ernst Stadlober and Hendrik Purwins and T. Purwins and Dietmar Gleispach",

year = "2010",

language = "English",

note = "10th European Advanced Equipment Control AEC/APC Conference ; Conference date: 28-04-2010 Through 30-04-2010",

}

TY - CONF

T1 - Scheduling of Foreline Maintanance on a CVD Tool Based on FDC Parameter

AU - Hayderer, Günter

AU - Radl, Marlies

AU - Scheibelhofer, Peter

AU - Stadlober, Ernst

AU - Purwins, Hendrik

AU - Purwins, T.

AU - Gleispach, Dietmar

PY - 2010

Y1 - 2010

UR - http://www.aecapc-europe.com

M3 - Poster

T2 - 10th European Advanced Equipment Control AEC/APC Conference

Y2 - 28 April 2010 through 30 April 2010

ER -