Robust multivariate process control of multiway data in semiconductor fabrication

Peter Scheibelhofer; Günter Hayderer; Ernst Stadlober

Robust multivariate process control of multiway data in semiconductor fabrication

Peter Scheibelhofer, Günter Hayderer, Ernst Stadlober

Institute of Statistics (5060)

Research output: Contribution to conference › (Old data) Lecture or Presentation

Original language	English
Publication status	Published - 22 Sept 2014
Event	ENBIS-14 - Linz, Austria Duration: 22 Sept 2014 → 25 Sept 2014

Conference

Conference	ENBIS-14
Abbreviated title	ENBIS 14
Country/Territory	Austria
City	Linz
Period	22/09/14 → 25/09/14

Fields of Expertise

Information, Communication & Computing

Treatment code (Nähere Zuordnung)

Application

Access to Document

ENBIS2014_Scheibelhofer.pdfFinal published version, 1.57 MB

Cite this

@conference{2098ca5d2d374103884d4f26fd24849e,

title = "Robust multivariate process control of multiway data in semiconductor fabrication",

author = "Peter Scheibelhofer and G{\"u}nter Hayderer and Ernst Stadlober",

year = "2014",

month = sep,

day = "22",

language = "English",

note = "ENBIS-14, ENBIS 14 ; Conference date: 22-09-2014 Through 25-09-2014",

}

TY - CONF

T1 - Robust multivariate process control of multiway data in semiconductor fabrication

AU - Scheibelhofer, Peter

AU - Hayderer, Günter

AU - Stadlober, Ernst

PY - 2014/9/22

Y1 - 2014/9/22

UR - http://www.enbis.org/activities/events/current/253_ENBIS_14/?_ts=1&_ts=1

M3 - (Old data) Lecture or Presentation

T2 - ENBIS-14

Y2 - 22 September 2014 through 25 September 2014

ER -

Robust multivariate process control of multiway data in semiconductor fabrication

Conference

Fields of Expertise

Treatment code (Nähere Zuordnung)

Access to Document

Other files and links

Applied Statistics

Cite this

Robust multivariate process control of multiway data in semiconductor fabrication

Conference

Fields of Expertise

Treatment code (Nähere Zuordnung)

Access to Document

Other files and links

Projects

Applied Statistics

Cite this