Robust multivariate process control of multiway data in semiconductor fabrication

Peter Scheibelhofer, Günter Hayderer, Ernst Stadlober

Research output: Contribution to conference(Old data) Lecture or Presentation

LanguageEnglish
StatusPublished - 22 Sep 2014
EventENBIS-14 - Linz, Austria
Duration: 22 Sep 201425 Sep 2014

Conference

ConferenceENBIS-14
Abbreviated titleENBIS 14
CountryAustria
CityLinz
Period22/09/1425/09/14

Fields of Expertise

  • Information, Communication & Computing

Treatment code (Nähere Zuordnung)

  • Application

Cite this

Scheibelhofer, P., Hayderer, G., & Stadlober, E. (2014). Robust multivariate process control of multiway data in semiconductor fabrication. ENBIS-14, Linz, Austria.

Robust multivariate process control of multiway data in semiconductor fabrication. / Scheibelhofer, Peter; Hayderer, Günter; Stadlober, Ernst.

2014. ENBIS-14, Linz, Austria.

Research output: Contribution to conference(Old data) Lecture or Presentation

Scheibelhofer, P, Hayderer, G & Stadlober, E 2014, 'Robust multivariate process control of multiway data in semiconductor fabrication' ENBIS-14, Linz, Austria, 22/09/14 - 25/09/14, .
Scheibelhofer, Peter ; Hayderer, Günter ; Stadlober, Ernst. / Robust multivariate process control of multiway data in semiconductor fabrication. ENBIS-14, Linz, Austria.
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T1 - Robust multivariate process control of multiway data in semiconductor fabrication

AU - Scheibelhofer,Peter

AU - Hayderer,Günter

AU - Stadlober,Ernst

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Y1 - 2014/9/22

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M3 - (Old data) Lecture or Presentation

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