Robust multivariate process control of multiway data in semiconductor fabrication

Peter Scheibelhofer, Günter Hayderer, Ernst Stadlober

Research output: Contribution to conference(Old data) Lecture or Presentation

Original languageEnglish
Publication statusPublished - 22 Sep 2014
EventENBIS-14 - Linz, Austria
Duration: 22 Sep 201425 Sep 2014

Conference

ConferenceENBIS-14
Abbreviated titleENBIS 14
CountryAustria
CityLinz
Period22/09/1425/09/14

Fields of Expertise

  • Information, Communication & Computing

Treatment code (Nähere Zuordnung)

  • Application

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