Remote PACBED Thickness Determination by CNNs

Michael Oberaigner, Dieter Weber, Alexander Clausen, Daniel Knez, Gerald Kothleitner

Research output: Contribution to conferencePoster

Abstract

A convenient thickness determination technique for crystalline samples is the position averaged convergent-beam electron diffraction(PACBED) method [1]. The thickness is determined by finding the best match of the recorded PACBED pattern with a series ofsimulated PACBEDs. This process can be automatized by convolutional neural networks (CNNs), making the method fast and easy toapply [2]. However, the simulation of a synthetic dataset and the training of the CNNs have high computational cost and these CNNsare only valid for the specific trained system. Therefore, we built a working prototype of a server-based thickness determination byCNNs with a shared CNN-database and a GUI. By this, every scientist, even without knowledge about machine learning andmultislice simulation, could determine the specimen thickness by PACBEDs within few seconds during a microscope session.
Original languageEnglish
Publication statusPublished - 21 Apr 2022
Event12th ASEM Workshop: Austrian Society for Electron Microscopy - JKU Linz, Linz, Austria
Duration: 21 Apr 202222 Apr 2022
https://asem.at/events/12th-asem-workshop/

Conference

Conference12th ASEM Workshop
Country/TerritoryAustria
CityLinz
Period21/04/2222/04/22
Internet address

ASJC Scopus subject areas

  • Materials Science(all)

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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